Vacuum Feedthrough
These feedthroughs are designed forThese feedthroughs are designed forthe use with fiber-optics in vacuumchambers, such as for plasma andcoating deposition monitoring. They can be used in chambers with wallthicknesses of 5-40 mm and vacuumlevels up to 10-7 millibar.
The feedthrough assembly consists ofan M12 housing with Viton® O-ringand two SMA fiber-optic interconnects to allow easy coupling to fiber-optic cables and probes. In order to connect these assemblies to fiber-optic cables inside/outside the chamber, two extra SMA fiber interconnects (ME-FI-SM-MM) should be ordered separately.
The vacuum feedthrough can be delivered for all fiber diameters, from 50 μm up to 1000 μm for UV/VIS/NIR. A high temperature version of the vacuum feedthrough(-HT) is also available enabling the device to withstand temperatures up to 200°C.
| Fibers | 1 fiber, diameter 50µm, 100µm, 200µm, 400µm, 600µm, 800µm or 1000µm |
| Wavelength range | 200-800 nm (UV/VIS), 350-2000 (VIS/NIR) or 250-2500 nm (UV/VIS/NIR) |
| Connectors | Standard SMA905 connectors (2x) |
| Wall thickness of vacuum chamber | 5-40 mm |
| Leakrate | < 1x10-9mbar.l./s |
| Temperature | -40 ºC to 100 ºC (-HT version 200°C) |
| FC-VFT-xx50 | Vacuum feedthrough for 50 µm fibers, incl. SMA adapter, needs 2 extra SMA interconnects |
| FC-VFT-UVIR100 | As FC-VFT-xx50, for 100 µm fibers |
| FC-VFT-UVIR200 | As FC-VFT-xx50, for 200 µm fibers |
| FC-VFT-UVIR400 | As FC-VFT-xx50, for 400 µm fibers |
| FC-VFT-UVIR600 | As FC-VFT-xx50, for 600 µm fibers |
| FC-VFT-xxR800 | As FC-VFT-xx50, for 800 µm fibers |
| FC-VFT-xx1000 | As FC-VFT-xx50, for 1000 µm fibers |
| ME-FI-SM-MM | SMA fiber interconnect, 2 pieces needed for each vacuum feedthrough |
(specify xx = UV for UV/VIS fiber cables, IR for VIS/NIR
| -HT | High Temperature version (up to 200°C) |